Ion-Beam Systems & Data Storage Products
- Specifications
The DIAMONEX 3.5" Closed-drift (CD) Ion Source (model 200S IMOl-8) is designed specifically for high rate, reliable deposition of DLC coatings for the data storage industry. The source comprises an anode assembly, integrated hollow cathode electron source
(HCES) and electromagnet assembly in a compact, flange-mounted housing.
Utilities:
| Beam Current |
up to 12 Amps |
| Beam Voltage |
40-100 VDC (measured from anode to ground) |
| Operating pressure range |
Below 5 mT |
Ion Source Operating Ranges:
| Power |
|
DIAMONEX
220P8S01 power supply (see related specifications) |
| Cooling water |
|
0.5 gpm, 4YF |
| Argon feed |
|
Hollow cathode: 20 sccm to run, 70 sccm to ignite, Anode: 20-40 sccm to run (Film quality is dependent on gas purity-suggest 99.99% purity) |
| Connections |
|
Gas - 1/4"
MNPT, Power - custom connections to DIAMONEX power supply, Thermocouple - Type K (no readout supplied) |
| Hydrocarbon feed |
|
Model 220S2MOl-4 Hydrocarbon ring (see specifications below) |
Vacuum Ratings:
| at or below 5 x 10-8 t-l/sec helium leak rate |
Weight:
Products |
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DIAMONEX® Products
7331 William Avenue Allentown, PA 18106
Phone: 610-366-7100 •
Toll Free: 800-808-7101 •
Fax: 610-366-7144
A Division of Morgan
Advanced Ceramics
Morgan
Technical Ceramics is a Global Business
Unit of the Morgan
Crucible Company plc.
It comprises Morgan
Advanced Ceramics and Morgan
Electro Ceramics.
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